Compact intense extreme-ultraviolet source

Nanoimaging with a compact extreme-ultraviolet laser.

Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

Intense plasma discharge source at 13.5 nm for extreme-ultraviolet lithography.

We measured an emission of 6 mJ/pulse at 13.5 nm produced by the Li(2+) Lyman-? transition excited by a fast capillary discharge, using a lithium hydride capillary. 75% of the energy emanated from a spot size of 0.6 mm. The emission is narrow band and would thus be useful in extreme-ultraviolet lithography imaging systems that use Mo:Si multilayer mirrors. The output within the bandwidth of Mo:...

Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source.

We report the demonstration of a scanning probe coherent diffractive imaging method (also known as ptychographic CDI) using a compact and partially coherent gas-discharge plasma source of extreme ultraviolet (EUV) radiation at a 17.3 nm wavelength. Until now, CDI has been mainly carried out with coherent, high-brightness light sources, such as third generation synchrotrons, x-ray free-electron ...

Laser triggered Z-pinch broadband extreme ultraviolet source for metrology

Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

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